Quantitative Energy Dispersive Analysis Technique of SiGe at Site-specific area using In-situ Lift-out TEM sample
نویسندگان
چکیده
منابع مشابه
Ex situ Lift Out of PFIB Prepared TEM Specimens
Inductively coupled plasma sources are capable of producing Xe + ions for commercial focused ion beam (FIB) applications [1,2]. It should be no surprise that the longstanding Ga + FIB strategies for transmission electron microscopy (TEM) specimen preparation are directly applicable and transferrable to the plasma FIB (PFIB). Indeed, we showed a few years ago that the Xe + PFIB can produce elect...
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Transmission electron microscopy (TEM) is a very powerful technique for materials characterization, providing information relating to morphology, composition, and crystal structure. Selected area diffraction patterns (SADPs) are crystallographic data that can be obtained using a TEM instrument. Conventional identification through SADP/TEM is tricky and tedious, thereby increasing the difficulty...
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The focused-ion-beam (FIB) is the method of choice for site-specific sample preparation for Transmission Electron Microscopy (TEM) in material sciences. A lamella can be physically lifted out from a specific region of a bulk specimen with submicrometer precision and thinned to electron transparency for high-resolution imaging in the TEM. The possibility to use this tool in life sciences applica...
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1 Department of Physics, University of Central Florida, P.O. Box 162385, Orlando, USA 2 Department of Microelectronics and Semiconductor Devices, Technical University of Moldova, Stefan cel Mare Blvd. 168, 2004, Chisinau, Moldova 3 Apollo Technologies, Inc., 205 Waymont Court, S111, FL 32746, Lake Mary, USA 4 Advanced Materials Processing and Analysis Center, and Department of Mechanical, Mater...
متن کاملTheory and New Applications of Ex Situ Lift Out.
The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted g...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2013
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927613008428